Method for controlling stress gradients in PVD aluminum nitride
نویسندگان
چکیده
منابع مشابه
Boron-nitride and aluminum-nitride "Pringles" and flapping motion.
Motivated by the recent successful synthesis of a new nanocarbon, namely, a warped, double-concave graphene "Pringle" (Nat. Chem., 2013, 5, 739), we investigate properties of warped boron-nitride (BN) and aluminum-nitride (AlN) analogues, i.e., the non-planar B40N40H30 and Al40N40H30 "Pringles" using density functional theory (DFT) calculations. Particular attention is placed on the effect of n...
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ژورنال
عنوان ژورنال: Journal of Micromechanics and Microengineering
سال: 2018
ISSN: 0960-1317,1361-6439
DOI: 10.1088/1361-6439/aad91a